JPH0356129U - - Google Patents
Info
- Publication number
- JPH0356129U JPH0356129U JP11596989U JP11596989U JPH0356129U JP H0356129 U JPH0356129 U JP H0356129U JP 11596989 U JP11596989 U JP 11596989U JP 11596989 U JP11596989 U JP 11596989U JP H0356129 U JPH0356129 U JP H0356129U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- center
- gas
- resist
- diffuses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11596989U JPH0356129U (en]) | 1989-10-02 | 1989-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11596989U JPH0356129U (en]) | 1989-10-02 | 1989-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0356129U true JPH0356129U (en]) | 1991-05-30 |
Family
ID=31664278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11596989U Pending JPH0356129U (en]) | 1989-10-02 | 1989-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0356129U (en]) |
-
1989
- 1989-10-02 JP JP11596989U patent/JPH0356129U/ja active Pending
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